JPH086182Y2 - クリーンルーム - Google Patents
クリーンルームInfo
- Publication number
- JPH086182Y2 JPH086182Y2 JP14637989U JP14637989U JPH086182Y2 JP H086182 Y2 JPH086182 Y2 JP H086182Y2 JP 14637989 U JP14637989 U JP 14637989U JP 14637989 U JP14637989 U JP 14637989U JP H086182 Y2 JPH086182 Y2 JP H086182Y2
- Authority
- JP
- Japan
- Prior art keywords
- harmful gas
- clean room
- filter
- air
- chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000428 dust Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 41
- 239000000126 substance Substances 0.000 description 30
- 238000001514 detection method Methods 0.000 description 11
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14637989U JPH086182Y2 (ja) | 1989-12-19 | 1989-12-19 | クリーンルーム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14637989U JPH086182Y2 (ja) | 1989-12-19 | 1989-12-19 | クリーンルーム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0383744U JPH0383744U (en]) | 1991-08-26 |
| JPH086182Y2 true JPH086182Y2 (ja) | 1996-02-21 |
Family
ID=31692971
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14637989U Expired - Lifetime JPH086182Y2 (ja) | 1989-12-19 | 1989-12-19 | クリーンルーム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH086182Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7398626B2 (ja) * | 2020-02-06 | 2023-12-15 | 株式会社大林組 | 空調システム |
-
1989
- 1989-12-19 JP JP14637989U patent/JPH086182Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0383744U (en]) | 1991-08-26 |
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